Direct Geometric Positioning for the Three- Dimensional Imaging Microware Altimeter
نویسندگان
چکیده
منابع مشابه
Interferometric-spatial-phase imaging for sub-nanometer three-dimensional positioning
Current alignment technology is incapable of satisfying the needs of imminent generations of lithography. This dissertation delineates a novel method of alignment and three-dimensional position metrology that is compatible with many forms of proximity lithography. The method is called Interferometric-Spatial-Phase Imaging (ISPI), and is based on encoding three-dimensional position information i...
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ژورنال
عنوان ژورنال: DEStech Transactions on Computer Science and Engineering
سال: 2017
ISSN: 2475-8841
DOI: 10.12783/dtcse/cii2017/17307